Abstract: This paper presents a novel front-side non-SOI fabricated tri-axis capacitive accelerometer with a dual quantization electromechanical sigma-delta modulator (EM-ΣΔM) interface. It can be ...
Abstract: A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows ...
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